| Service | Detail |
|---|---|
| Pricing | Custom quote per model, configuration and order volume |
| Lead Time | Confirmed with each quote |
| Delivery | Available terms are confirmed with each quote |
Check the product page, checkout and store policies for the terms that apply to your order.
SIASUN's Wafer Transfer Robot product line is purpose-built for semiconductor front-end processes, operating in Class 1 ultra-clean environments to enable high-speed, smooth, and damage-free transfer of 12-inch (300 mm) wafers. Backed by nearly 20 years of core-team expertise and fully proprietary intellectual property, the technology meets international benchmarks for precision and reliability.
The portfolio covers the complete front-end automation chain: EFEM (Equipment Front-End Module), atmospheric robot arms (Blade D and Blade S series), vacuum transfer robots, Loadport wafer load ports, SMIF wafer loading devices, Aligner pre-alignment stations, and vertical furnace mini-stocker (Mini STK) solutions.
Direct-drive technology delivers ultra-high positioning accuracy and repeatability, satisfying the wafer auto-loading and unloading requirements of lithography, etch, CVD/PVD, and other process tools — significantly improving line throughput and yield.
Manufactured in a 10,000 m² cleanroom facility with a team of over 300 R&D engineers, SIASUN provides scalable, high-reliability automation solutions to semiconductor equipment suppliers worldwide.
| Manufacturer | SIASUN (Shenyang Siasun Robot & Automation) |
|---|---|
| Application | Semiconductor front-end automation; wafer transfer within EFEM and cluster tools |
| Product Family | EFEM (Equipment Front End Module); Blade D-Series & Blade S-Series atmospheric robots; vacuum manipulators |
| Environment | Atmospheric (EFEM mini-environment) and vacuum transfer module variants |
| Core EFEM Modules | Load port, wafer transfer robot, aligner (pre-alignment) device |
| Supported Functions | Wafer transfer between load ports, load locks and process chambers; SMIF load device; vertical-furnace (Mini STK) handling |
| IP / Origin | Fully self-developed intellectual property; technical indicators stated to reach international advanced level |
| Cleanroom Manufacturing | 10,000+ m2 cleanroom factory; 300+ R&D staff |
Pricing for the Wafer Transfer Robot — Semiconductor Front-End Automation is quote-based. Request a quote from for the available price, MOQ and lead time.
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Lead time is confirmed with the quote and depends on the selected configuration and quantity.